Study of Laser Nano-Lithography Technology on Patterned ITO Substrate
碩士 === 國立中正大學 === 光機電整合工程研究所 === 102 === In this study, the laser interference lithography and dry etching process on ITO thin film has been discussed. We used laser interference lithography technique produce the square and the hexagon periodical pattern nanostructures on ITO thin films. For square,...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/s79d9g |