Fabrication of Pd/PdO thin film as sensing membrane for Extended Gate Field Effect Transistor (EGFET)

碩士 === 長庚大學 === 光電工程研究所 === 102 === A palladium oxide (PdO) thin film pH sensor based on extended gate filed effect transistor (EGFET) technique is fabricated and its pH sensing properties, stability and reliability were studied. The thesis outlines the procedures of converting palladium thin films...

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Bibliographic Details
Main Authors: Hsu Ko, 柯旭
Other Authors: L. B. Chang
Format: Others
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/24115547390874272971