Fabrication study of ultraviolet sensors using surface acoustic wave devices
碩士 === 中原大學 === 電子工程研究所 === 102 === In this thesis, the ultraviolet sensors based on surface acoustic wave (SAW) oscillators using AlN piezoelectric material are studied. The oscillating frequency of this AlN UV sensor shifted under deep ultraviolet illumination, and shows the correlation with the t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57797810554795938169 |