Recipe Modification for Uniformity of Start Coating Thickness in TFT LCD Color Filter Photoresist
碩士 === 中原大學 === 機械工程研究所 === 102 === Color filter of TFT- LCD display on RGB Layer has abnormal coating , it can easy redue to color shift issue ( Macro review status ). This issue caused panel yield loss and cost increased. For this issue, we study how to improve the uniformity of start coating t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87g9d3 |