Predicting the job cycle time in semiconductor manufacturing with ANFIS

碩士 === 逢甲大學 === 工業工程與系統管理學系 === 102 === Predicting the job cycle time is a critical task in semiconductor manufacturing. However, the complexity of processing and the diversity of equipment make the process flow very difficult to control. As a result, it becomes extremely to accurate predict the job...

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Bibliographic Details
Main Author: 連翊涵
Other Authors: 陳亭志
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/54089050033421821143