Development of A Hollow Nanofiber-based Gas Microsensors Using the Coaxial Electrospun Technology
碩士 === 逢甲大學 === 自動控制工程學系 === 102 === The research presents the design of metal-oxide semiconductor micro gas sensors base on MEMS technology with nano-properties for CO gas sensing. Sensitivity is defined by measuring the variation of resistance for sensing layers caused by Schottky contanct when ga...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33117206839217003631 |