The Properties of Aluminium Nitride Films Grown on Silicon Substrates
碩士 === 崑山科技大學 === 材料工程研究所 === 102 === In this research, the AlN thin films were deposited on Silicon substrate by chemical vapor deposition method. The dependence between substrate temperatures and times were investigated by X-Ray diffraction (XRD), and scanning electron microscopy (SEM). As the sub...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33375379856407070683 |