MgZnO-Based UV photodetectors
碩士 === 崑山科技大學 === 光電工程研究所 === 102 === In this paper, the MgZnO thin film were deposited on quartz substrate by RF-sputtering system. The ambient controlling were divided to the flow rate of oxygen and the annealing temperature, compare the film characteristic and found the better condition to deposi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34370777660456888613 |