Thermal Stability Investingation of Microwave Hydrogen Plasma Annealed SnOx/NiCrOx/Ag/AZO/SnOx Films Applied in Low Emissivity Glass
碩士 === 崑山科技大學 === 電機工程研究所 === 102 === The SnOx/NiCrOx/Ag/AZO/SnOx (SNAAS) films deposited on glass were produced by magnetron sputtering and applied as low emissivity glass. Microwave hydrogen plasma was following treated on the SNAAS films. The process pressure of microwave hydrogen plasma was vari...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64852145895924901294 |