Thermal Stability Investigation of Microwave Nitrogen Plasma Treated SnOx/NiCrOx/Ag/AZO/SnOx Films Applied in Low Emissivity Glass
碩士 === 崑山科技大學 === 電機工程研究所 === 102 === The SnOx/NiCrOx/Ag/AZO/SnOx (SNAAS) films deposited on glass were produced by magnetron sputtering and applied as low emissivity glass. Microwave nitrogen plasma was following treated on the SNAAS films. Thermal effect of the nitrogen plasma annealed SNAAS films...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/97708396278639275643 |