Thermal Stability Investigation of Microwave Nitrogen Plasma Treated SnOx/NiCrOx/Ag/AZO/SnOx Films Applied in Low Emissivity Glass

碩士 === 崑山科技大學 === 電機工程研究所 === 102 === The SnOx/NiCrOx/Ag/AZO/SnOx (SNAAS) films deposited on glass were produced by magnetron sputtering and applied as low emissivity glass. Microwave nitrogen plasma was following treated on the SNAAS films. Thermal effect of the nitrogen plasma annealed SNAAS films...

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Bibliographic Details
Main Authors: Jum– Lin Lai, 賴俊霖
Other Authors: Shang-Chou Chang
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/97708396278639275643