Synthesis of Aluminum Nitride Powders via Two-Stage Atmospheric-pressure Microwave Plasma Processing

碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系博碩士班 === 102 === The preparation of aluminum nitride (AlN) powders by direct nitridation were usually operated at high temperature (1000℃) with a long reaction time (3 hrs). By using a atmospheric pressure microwave plasma to synthesize AlN powder at a lower temperatu...

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Bibliographic Details
Main Authors: Heng Hsien Su, 蘇恆賢
Other Authors: Cheng-Hsien Tsai
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/9x4666