Synthesis of Aluminum Nitride Powders via Two-Stage Atmospheric-pressure Microwave Plasma Processing
碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系博碩士班 === 102 === The preparation of aluminum nitride (AlN) powders by direct nitridation were usually operated at high temperature (1000℃) with a long reaction time (3 hrs). By using a atmospheric pressure microwave plasma to synthesize AlN powder at a lower temperatu...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/9x4666 |