Applying RFID to the SECS/GEM automatic wafer coating system.

• Main Authors: Tzu-Kun Hung, 洪慈堃
• Other Authors: Hung-Yu Wang
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/16109480998523970729

碩士 === 國立高雄應用科技大學 === 電子工程系碩士班 === 102 === The yield Improvement, sufficient throughput, and quality guarantee are the main aspects to enhance the competition ability of a company. These issues can be attained by the automation of production line. The ultimate target is the production system automation with minimum human supervision. One of the limitations of production line automation is the incompatible communication interfaces between machines from the same or different companies. To solve this problem, Semiconductor Equipment and Materials International (SEMI) announce the equipment communication standard SECS in 1980. The wafer coating process is a very important stage within the semiconductor production. The operation of some equipment in present factory is manual so it introduces several human errors. In this thesis, following SECS/GEM standard, we have developed the controlled codes for automatic wafer coating system. By applying radio frequency identification (RFID) technology to products recognition, the host machine can remotely control and communicate with the equipment for wafer coating operation. The function includes wafer lot number identification, wafer counting, and operation sequence arrangement. It shows that the human error has been reduced massively by using the proposed approach.