The Properties of Depositing ZnO Thin Film on Molybdenum Electrodes
碩士 === 國立高雄應用科技大學 === 電子工程系碩士班 === 102 === In this study, we deposited (100)-oriented ZnO film by reactive RF magnetron sputtering method, and apply ZnO film to fabricate thin film bulk acoustic resonator (FBAR). The FBAR structure was the aluminum electrode / ZnO piezoelectric layer / molybdenum el...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8taf72 |