Semiconductor CMP Wastewater Treatment - Taguchi Method to Create an Optimized Operation

碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 102 === The study is on the improvement of effluent from the wastewater plant, making the experimental data by Taguchi method, with the orthogonal table configuration, response table, response graphs, ANOVA (Analysis of Variance) processing analysis, and setup a...

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Bibliographic Details
Main Authors: Chuang Kuei-Hsiung, 莊貴雄
Other Authors: Chen Shinn-Horng
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/pxwp26