Semiconductor CMP Wastewater Treatment - Taguchi Method to Create an Optimized Operation

• Main Authors: Chuang Kuei-Hsiung, 莊貴雄
• Other Authors: Chen Shinn-Horng
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/pxwp26

碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 102 === The study is on the improvement of effluent from the wastewater plant, making the experimental data by Taguchi method, with the orthogonal table configuration, response table, response graphs, ANOVA (Analysis of Variance) processing analysis, and setup a set of the best operating mode. And it applies the best controlling parameter directly on the real practice, finally verify optimum operating condition. As a result of the five factors as coagulation precipitation to the final effluent, this experiment adopts COD (Chemical Oxygen Demand) value expecting smaller the best characteristic. The controlling factors include: The adding amount of aluminum sulfate, waste water PH value controlling, waste water degree of uniformity, polymer adding amount, wastewater entering flowing amount controlling. Through the simulation experiment obtains the optimizing factor. And verifying by practical waste water manipulation, the final researching results showed that the COD value decreases about 33.7% and it saves 300000 NT on the cost of waste water treatment medication per year , through the experimental result learning that use Taguchi experimental method applying on the waste water improvement is really effective. Key Words: Taguchi method, quality engineering, waste water management, chemical mechanical grinding, CMP waste water.