Fabrication and Measurement of CMOS MEMS-Based Thermoelectric Vacuum Sensor
碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 102 === This paper presents the measurement and the fabrication of thermocouple vacuum sensors fabricated by a low cost CMOS process and MEMS technology. The thermocouple vacuum sensors have two types of suspended structures with different solid thermal conduct...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48574613951290320930 |