Fabrication and Measurement of CMOS-MEMS Pirani Gauge

碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 102 === The purpose of this dissertation is to fabricate and measure two CMOS Pirani gauges. One of them was fabricated by using CIC TSMC CMOS-MEMS 0.35μm process. The sensor structure consists of a floating membrane and two resistor materials, including aluminum...

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Bibliographic Details
Main Authors: Yi-Hang Li, 李沂航
Other Authors: Chung-Nan Chen
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/wrdp75