Li, Y., 李沂航, & Chen, C. (2014). Fabrication and Measurement of CMOS-MEMS Pirani Gauge.
Chicago Style (17th ed.) CitationLi, Yi-Hang, 李沂航, and Chung-Nan Chen. Fabrication and Measurement of CMOS-MEMS Pirani Gauge. 2014.
MLA (8th ed.) CitationLi, Yi-Hang, et al. Fabrication and Measurement of CMOS-MEMS Pirani Gauge. 2014.
Warning: These citations may not always be 100% accurate.