Fabrication and Measurement of CMOS-MEMS Pirani Gauge
碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 102 === The purpose of this dissertation is to fabricate and measure two CMOS Pirani gauges. One of them was fabricated by using CIC TSMC CMOS-MEMS 0.35μm process. The sensor structure consists of a floating membrane and two resistor materials, including aluminum...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/wrdp75 |