Growth of TiO2-doped ZnO Transparent Conductive Films by Sputtering
碩士 === 龍華科技大學 === 工程技術研究所 === 102 === Ceramic targets (TiO2-doped zinc oxide, TZO) with a mixture of ZnO powder (99.9% purity) and TiO2 powder (99.9% purity, the TiO2 content is approximately 2 wt%) were employed in our experiment as source materials under a pressure of 12 MPa in ambient atmosphere...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/04501783841807532755 |