Design and Control of a Ballscrew-Piezoelectric Hybrid Drive for Long Stroke Nano-positioning System.
碩士 === 龍華科技大學 === 機械工程系碩士班 === 102 === This thesis focuses on the large-travel nano-scale positioning system, and developes a large-travel nano-scale position system driven by ball screw coupled with piezoelectricity based on the structural design concept of two-phase combination drive. According to...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94238332537489056513 |