Cathodic arc evaporated CrAlSiN coatings with multi-cycle depositions
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 102 === The study used by cathode arc deposition to process nano-multi cycle of deposition CrAlSiN thin film which substrate used SUS304 and Tungsten steel. The system selected by PLATIT 80+ that is used on the industry widely. The experiment processed four different...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01302734791497431759 |