Cathodic arc evaporated CrAlSiN coatings with multi-cycle depositions

• Main Authors: Chang, Yen-Shuo, 張晏碩
• Other Authors: Ho, Wei-Yu
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/01302734791497431759

碩士 === 明道大學 === 材料科學與工程學系碩士班 === 102 === The study used by cathode arc deposition to process nano-multi cycle of deposition CrAlSiN thin film which substrate used SUS304 and Tungsten steel. The system selected by PLATIT 80+ that is used on the industry widely. The experiment processed four different muti-cycle deposition CrAlSiN coating.The experiment was divided into two steps. First, it showed that Characteristic will change on microstructures and mechanical of muti-cycle deposition of CrAlSiN coating. The result show that the microstructures that used by Field Emission Scanning Electronic Microscope became honeycomb like morphology can be considered as CrAlN grains embedded in the SixN matrix which structure can be nano-structure. The hardness that used nanoindent increased from 41GPa of 1 cycle to 43GPa of 4 cycles with the increase of coating thickness. But the values are in error, so the results are similar of the hardness. Finally,due to CrAlSiN thin films have a high hardness, the test methods used by sandblasting test that contain dry sandblasting test 5 minutes and wet sandblasting test of 30 minutes and 60 minutes to detect the characteristic. In the sandblasting test, wet sandblasting test its roughness improving gradually. Because of the hardness of SiO2 below than CrAlSiN coating, it can be improve hardness helpfully that cathode arc deposition created shortcoming of high roughness. In the dry sandblasting test which sand used by emery and test 5 minutes, the result showed that the roughness improved significantly but the coatings ware not peeled completely. The coatings of muti-cycles of deposition of CrAlSiN had good properties in the harsh environment. Keywords: CrAlSiN, sandblasting test, hardness, roughness, mechanical propert