Research of Saving Energy of Cleanroom Chiller System
碩士 === 明新科技大學 === 精密機電工程研究所 === 102 === In recent years, due to the energy crisis let us realize the limited nature of resources and sustainable development of the planet. Taiwan's economic development main fore is high-tech industries, especially semiconductor and optoelectronics. Taiwan...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95974052322233290807 |