| Summary: | 碩士 === 明新科技大學 === 精密機電工程研究所 === 102 === In recent years, due to the energy crisis let us realize the limited nature of resources and sustainable development of the planet. Taiwan's economic development main fore is high-tech industries, especially semiconductor and optoelectronics. Taiwan’s energy relies on imports, in order to survive Earth and enhance the competitiveness of enterprises; saving energy seems important and urgent.
There are factories spread all over science parks, and many companies still keep building new factories. Most of factories that have cleanroom run 24 hours all of the year. We observe the energy demand in large factories find out that AC system needs most power consumptions. According to that, this thesis research about cleanroom temperature control system: First, testing cooling water at different temperature at 26.5℃, 28.5℃, 30.5℃ and 32.5℃, and comparing how different power consumptions that chiller load, then find out the optimization operation point; Second, use the cooling water that temperature at the chiller is optimization operation, and find out the optimization water flow by observe chiller’s power consumptions in different cooling water flow; Finally, testing power consumptions that once run 3 chillers when they set up side by side, then know different run set cause different power consumptions.
This research find when chiller’s operation loads at 70%~100% saving more energy. Optimization operation load of chiller should use cooling water temperature at 26.5℃ and set chiller load at 90%. When the pump of cooling water at 56Hz, cooling water flow 14577LPM, can save more energy. Besides, comparing power consumptions that run different chillers side by side find energy saving effect reach 1.31%, and don’t need to spend extra cost. It because when chiller run has more area to dissipate heat can lower the power consumptions of chiller.
Keyword: cleanroom, chiller, temperature control, energy saving.
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