Preparation ,Electrical and Optical Properties of NiO Thin Film by Reactive Magnetron Sputtering
碩士 === 明志科技大學 === 材料工程系碩士班 === 102 === In this study, the NiO films with p-type conduction have been achieved by Three Dimensional Physical Vapor Deposition (3D-PVD) system using reactive magnetron sputtering. The optoelectronic properties of NiO films can be improved by changing the process paramet...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pyd364 |