Microstructure and Characteristics of Zinc Titanate Thin Films by Reactive Magnetron Co-sputtering
博士 === 國立中興大學 === 材料科學與工程學系所 === 102 === The aim of this study is to prepare, characterize, and apply the zinc titanate thin films by reactive magnetron co-sputtering in Ar/O2 atmosphere. The effects of Zn : Ti atomic ratio and annealing temperature were studied on the crystalline behavior, dielectr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21007677406852390928 |