A stress response study of MOSFET with S/D stressors
碩士 === 國立中興大學 === 光電工程研究所 === 102 === The stress response of S/D stressors to MOSFET is studied in this work. SolidWorks is first applied to drawing the transistor structural diagram; then, the ANSYS stress analysis simulator is utilized for simulating the 3D channel stress distribution of transisto...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/93320597313217843195 |