Synthesis and characterization of zirconia films on air-based sputtering deposited ZrN/Si by plasma electrolytic oxidation
碩士 === 國立中興大學 === 材料科學與工程學系所 === 102 === Abstract This research is to make ZrO2 films on air-based sputtering deposited ZrN/Si substrates by plasma electrolytic oxidation. The films have porous characteristics which were formed by plasma electrolytic oxidation. The ZrN is conductive and biocompatibi...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/56467514993271845312 |