Influence of Photo-illumination on specimen stability in scanning capacitance microscopy
碩士 === 國立中興大學 === 物理學系所 === 102 === Sample preparation for scanning capacitance microscopy (SCM) significantly influences the accuracy of SCM measurements. Especially, the quality of the oxide layer on sample surface including surface roughness of the oxide layer, interface traps, and charges in the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83871589527050894465 |