Analysis of Tool and Cutting Parameters Effect on PZT Micro-machining
碩士 === 國立中興大學 === 機械工程學系所 === 102 === The demand in device made of brittle material increases dramatically and the piezo-electric material plays an important role in MEMS and Bio device. However, the low efficiency and quality of patterning the PZT material limit its applications in mass production...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14098466076900104420 |