Analysis of Tool and Cutting Parameters Effect on PZT Micro-machining
碩士 === 國立中興大學 === 機械工程學系所 === 102 === The demand in device made of brittle material increases dramatically and the piezo-electric material plays an important role in MEMS and Bio device. However, the low efficiency and quality of patterning the PZT material limit its applications in mass production...
Main Authors: | Ko-Heng Chen, 陳科翰 |
---|---|
Other Authors: | 盧銘詮 |
Format: | Others |
Language: | zh-TW |
Published: |
2014
|
Online Access: | http://ndltd.ncl.edu.tw/handle/14098466076900104420 |
Similar Items
-
Analysis of cutting characteristics and corresponding signals in PZT thin film micro-cutting
by: Tsen-Chen Tai, et al.
Published: (2013) -
Study of ultrasonic assisted cutting for PZT thin film machining.
by: Meng-Hui Su, et al.
Published: (2013) -
The development of tool condition and cutting quality monitoring in PZT/Si wafer micro milling by Neural Network and AE signal
by: Ling-Fang Chang, et al.
Published: (2014) -
Determination of Optimum Cutting Parameters of Machine Tools
by: Wen, Cherng Shyong, et al.
Published: (1998) -
A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT
by: Zhe Wang, et al.
Published: (2015-01-01)