Fabrication of metal/oxide/ZnO nanorods structures for ultraviolet photodetection
碩士 === 國立中興大學 === 電機工程學系所 === 102 === In this study, metal-oxide-ZnO nanorods(NRs) structures were fabricated for the ultra-violet(UV) photodetector applications. ZnO NRs were grown on Al-doped ZnO(AZO) seed layers were grown by RF sputtering. The growth temperature and annealing condition of AZO se...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48707307773625753223 |