Design and Fabrication of In-Situ Monitoring System for Epitaxial Growth Applications
碩士 === 國立中興大學 === 精密工程學系所 === 102 === The main goal of this research is to develop in-situ monitoring technology of GaN-based materials grown by metalorganic chemical vapor deposition (MOCVD) for epilayer stress measurement. Using this technique, we can understand the stress variation between the wa...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
|
Online Access: | http://ndltd.ncl.edu.tw/handle/00281115481455001910 |