Investigation of carrier lifetime for Al2O3 thin films on silicon by liquid phase deposition
碩士 === 國立成功大學 === 化學工程學系 === 102 === The alumina thin films were coated by low cost liquid phase deposition (LPD) and it indeed can reduce the surface recombination velocity which was measured by lifetime tester Sinton WCT-120 in the quasi-steady state mode. In order to compete with the passivation...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/m42xw3 |