Soft-Mask Lithography with Application in Manufacturing Pattern Sapphire Substrate
博士 === 國立成功大學 === 材料科學及工程學系 === 102 === This dissertation has successfully demonstrated two different types of soft lithography techniques to fabrication pattern sapphire substrate (PSS), namely “metal embedded lithography” and “soft photo-mask contact lithography”. The metal embedded lithography is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9a9n3m |