The optimization of experimental parameters in the vapor-liquid-solid tri-phase growth of 3C-SiC films
碩士 === 國立成功大學 === 材料科學及工程學系 === 102 === 3C-SiC films were deposited on the (111) Si substrates by the vapor-liquid-solid (VLS) tri-phase growth method, which involved the following steps: (1) a Cu thin layer was evaporated on the Si substrate prior to the growth, (2) the substrate was heated up to m...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95356991665918035443 |