Investigations of the properties of ZnO-based TCO thin films grown via rf sputtering deposition method on flexible substrates for thin-film transistor applications

博士 === 國立成功大學 === 電機工程學系 === 102 === Zinc oxide (ZnO) thin films with n-type conductivity and high transparency have been applied in devices such as transparent electrodes, photovoltaic cells, and thin-film transistors (TFTs). In this work, ZnO-based films were deposited by RF sputtering method and...

Full description

Bibliographic Details
Main Authors: Jia-LingWu, 吳佳玲
Other Authors: Sheng-Yuan Chu
Format: Others
Language:en_US
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/7a2ctr