Development of Nano-Stencil Lithography and its Application
碩士 === 國立成功大學 === 光電科學與工程學系 === 102 === Nano-stencil lithography (NSL) is a nanofabrication method that utilizes nanoscale openings on a thin membrane as stencils to fabricate large-scale nanostructures with low fabrication cost. The design flexibility and the high fabrication throughputs have enabl...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21974646213897742123 |