AVM Deployment System with Failover and Load-Balancing Capabilities
碩士 === 國立成功大學 === 製造資訊與系統研究所 === 102 === Virtual Metrology is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. In recent years, Automatic Virtual Metrology (AVM) System has been well developed and the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/69662143375456053020 |