AVM Deployment System with Failover and Load-Balancing Capabilities
碩士 === 國立成功大學 === 製造資訊與系統研究所 === 102 === Virtual Metrology is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. In recent years, Automatic Virtual Metrology (AVM) System has been well developed and the...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69662143375456053020 |