Study on Fabrication of Bridged-Grain Poly-Si Thin-Film-Transistors with Nanoimprint Technology
碩士 === 國立暨南國際大學 === 電機工程學系 === 103 === In this thesis, we focus on the study of polycrystalline-silicon thin-film-transistors with bridged-grain channels fabricated using nanoimprint lithography. The grating doping regions in channel were fabricated by ion implantation through the PMMA, patterned wi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72670079602543359536 |