Design of Temperature Sensor by CMOS-MEMS Process
碩士 === 國立暨南國際大學 === 電機工程學系 === 102 === In this thesis, a design of a temperature sensor with micro cavity structure is presented for enhancing the absorptivity of incident IR energy. A variety of micro cavity structures with different aperture dimension and metal layers, as well as the incident angl...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05793761101211725245 |