Investigation of GaN grown on electron-beam evaporated metal layer by MOCVD
碩士 === 國立交通大學 === 光電系統研究所 === 102 === This study mainly investigated the growth of GaN films on electron-beam evaporated metal layers using an organic metal chemical vapor deposition system and further explored the growth mechanism of GaN. The smooth surface morphology of the grown GaN film on op...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/t9t8rv |