Epitaxial Al-doped ZnO Thin Films by Using In-situ Doping Atomic Layer Deposition
碩士 === 國立交通大學 === 工學院加速器光源科技與應用碩士學位學程 === 102 === We utilize the atomic layer deposition method to deposited nonpolar epitaxial Al-doped ZnO thin films on (101 ̅0) M-plane sapphire substrate. The purpose of this research which was try to understand the growth conductions and doping mechanism for for...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07251308270452230725 |