GaN-based LEDs grown on nano-scaled patterned sapphire substrates using anodic aluminum oxide as hard mask
碩士 === 國立交通大學 === 材料科學與工程學系所 === 102 === Patterned sapphire substrates was used to improve crystal quality and light extraction of LED. The study is focused on producing nano-scaled patterned sapphire substrates (NPSS) that possess nano- pits array by using anodic aluminum oxide (AAO). Then compare...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99006357725676588717 |