An Accurate and Efficient Procedure for Schottky Barrier Height Extraction

碩士 === 國立交通大學 === 電子研究所 === 102 === As the scaling of the semiconductor fabrication process, the contact resistance in semiconductor devices becomes larger due to the smaller contact area, and the total driving current is degraded. How to reduce the contact resistance is an urgent issue for the cont...

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Bibliographic Details
Main Authors: Fu, Tz-Yu, 傅子瑜
Other Authors: Tsui, Bing-Yue
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/60094448324726378077