A Study on Fabrication and Analysis of Suspended-Nanowire-Channel FETs and Poly-Si Nanowire-Channel CMOS Inverters
博士 === 國立交通大學 === 電子工程學系 電子研究所 === 102 === In this dissertation, we have successfully fabricated and investigated two kinds of novel devices, including suspended-nanowire (NW)-channel filed-effect transistors (FETs) and polycrystalline silicon (poly-Si) NW-channel complementary metal-oxide-semicondu...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/87538373119075732686 |