Research of High Sensitivity SiGe NWs Biosensor Modified by Dual Plasma Technology

碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 102 === In the recent years, semiconductor nanowires (NWs) has been extensively investigated and discussed in various fields. NWs have some unique properties. It is also considered as the one of the most potential topics. Our research team made good use of silicon...

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Bibliographic Details
Main Authors: Chen, YM, 陳義明
Other Authors: Chang, Kow-Ming
Format: Others
Language:en_US
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/msd9s9