A Study on Asymmetrical MOSFETs and Junctionless Polycrystalline Silicon Thin-Film Transistors
博士 === 國立交通大學 === 電子物理系所 === 102 === In this dissertation, we have developed a novel double-patterning (DP) technique for generation of gate patterns with gate length down to 80 nm using only a conventional I-line stepper. With a modification in the process steps, this DP technique can further shrin...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/28893693875539825696 |